by Robot Phoenix · Cleanroom Robot
Robot Phoenix lists 清洗机器人 四手 捞取 on https://www.robotphoenix.com/productsdetail/60.html. The table states a Z stroke of 585 mm marked customizable, a Theta stroke of 340 deg, an R1/R2/W1/W2 stroke of 445 mm, maximum speeds of 650 mm/sec, 250 deg/sec and 1500 mm/sec, Theta repeatability of ±0.02 deg, R repeatability of ±0.1 mm, a minimum rotation diameter of φ585 mm, a reach of 580 mm, 6-inch/8-inch/12-inch wafers, cleanliness Class [email protected], a load of 1.0 kgf and single-phase AC 220 V, 50/60 Hz. The Z repeatability cell prints ±01 mm. Confirm the current configuration and a quotation before selection. GrabaRobot has not independently tested this product.
| Manufacturer | Robot Phoenix / 翼菲科技 |
|---|---|
| Category | Cleanroom Robot |
| Official product page | www.robotphoenix.com/productsdetail/60.html |
| Price | Request a current quotation |
| MOQ / lead time | Ask supplier |
| type | Cleaning wafer-handling robot |
|---|---|
| z_stroke | 585 mm, customizable |
| theta_stroke | 340 deg |
| r_stroke | 445 mm on R1/R2/W1/W2 |
| max_speed | Z 650 mm/sec, Theta 250 deg/sec, R1/R2/W1/W2 1500 mm/sec |
| repeatability | Z cell prints ±01 mm, Theta ±0.02 deg, R1/R2/W1/W2 ±0.1 mm |
| minimum_rotation_diameter | φ585 mm |
| reach | 580 mm |
| wafer_sizes | 6 inch/8 inch/12 inch |
| cleanliness | Class [email protected] |
| payload | 1.0 kgf |
| supply | Single-phase AC 220 V, 50/60 Hz |
Official source recorded and checked 2026-11-12. Specifications are catalogue data. Confirm the exact configuration, documents, price, MOQ, lead time and support terms with the manufacturer before purchase.