by Robot Phoenix · Cleanroom Robot
Robot Phoenix lists 磁流体密封真空机器人 on https://www.robotphoenix.com/productsdetail/55.html. The table states a payload of 2 kg including the end effector, an R axis of 350 mm/s over 780 mm, a Theta axis of 160°/s over 330°, a Z axis of 20 mm/s over 45 mm, repeatability of ±0.1 mm, a swing radius of R300 mm, vacuum resistance of <1.33×10^-6 Pa, a weight of 30 kg and cleanliness [email protected]. The leak-rate cell prints <1×10⁹ std.cc/sec He, with a superscript 9 and no minus sign. Confirm the current configuration and a quotation before selection. GrabaRobot has not independently tested this product.
| Manufacturer | Robot Phoenix / 翼菲科技 |
|---|---|
| Category | Cleanroom Robot |
| Official product page | www.robotphoenix.com/productsdetail/55.html |
| Price | Request a current quotation |
| MOQ / lead time | Ask supplier |
| type | Vacuum wafer-handling robot |
|---|---|
| payload | 2 kg including the end effector |
| r_axis | 350 mm/s, stroke 780 mm |
| theta_axis | 160°/s, stroke 330° |
| z_axis | 20 mm/s, stroke 45 mm |
| repeatability | ±0.1 mm |
| swing_radius | R300 mm |
| vacuum | <1.33×10^-6 Pa |
| leak_rate | The cell prints <1×10⁹ std.cc/sec He |
| weight | 30 kg |
| cleanliness | [email protected] |
Official source recorded and checked 2026-11-12. Specifications are catalogue data. Confirm the exact configuration, documents, price, MOQ, lead time and support terms with the manufacturer before purchase.