by Robot Phoenix · Cleanroom Robot
Robot Phoenix lists 大负载晶圆机器人 on https://www.robotphoenix.com/productsdetail/54.html. The table states low-voltage servo drive on the R, Z and Theta axes, an R extension greater than 700 mm with an arm length of 260 mm, a Z stroke of 300 mm, a Theta stroke of ±170°, maximum speeds of 700 mm/sec, 500 mm/sec and 130 deg/sec, a load of ≤10 kg, repeatability of 伸缩±0.1 mm and 回转轴≤±0.02 deg, cleanliness ISO Class 1, a weight of 50 kg and supply of single-phase AC 200~240 V / 9 A, 50/60 Hz, LN GND. A download link on the page is named 大负载晶圆机器人Z300R260.pdf. The product title does not use that code. Confirm the current configuration and a quotation before selection. GrabaRobot has not independently tested this product.
| Manufacturer | Robot Phoenix / 翼菲科技 |
|---|---|
| Category | Cleanroom Robot |
| Official product page | www.robotphoenix.com/productsdetail/54.html |
| Price | Request a current quotation |
| MOQ / lead time | Ask supplier |
| type | Wafer-handling robot |
|---|---|
| drive | Low-voltage servo on R, Z and Theta |
| r_stroke | >700 mm, arm length 260 mm |
| z_stroke | 300 mm |
| theta_stroke | ±170° |
| max_speed | R 700 mm/sec, Z 500 mm/sec, Theta 130 deg/sec |
| payload | ≤10 kg |
| repeatability | Extension ±0.1 mm; rotation axis ≤±0.02 deg |
| cleanliness | ISO Class 1 |
| weight | 50 kg |
| supply | Single-phase AC 200~240 V / 9 A, 50/60 Hz, LN GND |
Official source recorded and checked 2026-11-12. Specifications are catalogue data. Confirm the exact configuration, documents, price, MOQ, lead time and support terms with the manufacturer before purchase.