by Robot Phoenix · Cleanroom Robot
Robot Phoenix lists PRA三手指 on the dedicated wafer-handling list and on https://www.robotphoenix.com/productsdetail/57.html. The table states 6/8-inch wafers, an X1, X2 and X3 stroke of 385 mm at 3750 mm/s, a Z stroke of 1100 mm at 1600 mm/s, a T stroke of 330° at 150 rpm, repeatability of ±0.1 mm and ±0.1°, cleanliness Class [email protected]μm, a weight of ≈150 kg and supply of AC 220 V, 50/60 Hz. Confirm the current configuration and a quotation before selection. GrabaRobot has not independently tested this product.
| Manufacturer | Robot Phoenix / 翼菲科技 |
|---|---|
| Category | Cleanroom Robot |
| Official product page | www.robotphoenix.com/productsdetail/57.html |
| Price | Request a current quotation |
| MOQ / lead time | Ask supplier |
| type | Wafer-handling robot |
|---|---|
| wafer | 6/8 inch |
| x_stroke | 385 mm on X1, X2 and X3 |
| x_speed | 3750 mm/s on X1, X2 and X3 |
| z_stroke | 1100 mm |
| z_speed | 1600 mm/s |
| t_stroke | 330° |
| t_speed | 150 rpm |
| repeatability | ±0.1 mm; ±0.1° |
| cleanliness | Class [email protected]μm |
| weight | ≈150 kg |
| supply | AC 220 V, 50/60 Hz |
Official source recorded and checked 2026-11-12. Specifications are catalogue data. Confirm the exact configuration, documents, price, MOQ, lead time and support terms with the manufacturer before purchase.