by Robot Phoenix · Cleanroom Robot
Robot Phoenix lists 直驱真空机器人 on https://www.robotphoenix.com/productsdetail/58.html. The table states a dual arm, strokes of 40 mm on Z, 0~360 deg on T and 351 mm on R/W marked customizable, maximum speeds of 250 mm/s, 360 deg/s and 1000 mm/s, repeatability of ±0.05 mm, ±0.006 deg and ±0.05 mm, a load of 0.5 kg including the end effector, 3 servo axes, top mounting, a weight of 50 kg, vacuum of <1×10^-6 Pa, a body leak rate of <1×10^-9 std.cc/sec He and supply of DC 48 V 25 A and DC 24 V 5 A. The cleanliness cell prints [email protected]. Confirm the current configuration and a quotation before selection. GrabaRobot has not independently tested this product.
| Manufacturer | Robot Phoenix / 翼菲科技 |
|---|---|
| Category | Cleanroom Robot |
| Official product page | www.robotphoenix.com/productsdetail/58.html |
| Price | Request a current quotation |
| MOQ / lead time | Ask supplier |
| type | Direct-drive vacuum wafer robot |
|---|---|
| arm | Dual arm |
| stroke | Z 40 mm, T 0~360 deg, R/W 351 mm, customizable |
| max_speed | Z 250 mm/s, T 360 deg/s, R/W 1000 mm/s |
| repeatability | Z ±0.05 mm, T ±0.006 deg, R/W ±0.05 mm |
| payload | 0.5 kg including the end effector |
| axes | 3 servo axes |
| cleanliness | [email protected] |
| mounting | Top |
| weight | 50 kg |
| vacuum | <1×10^-6 Pa |
| leak_rate | <1×10^-9 std.cc/sec He |
| supply | DC 48 V 25 A, DC 24 V 5 A |
Official source recorded and checked 2026-11-12. Specifications are catalogue data. Confirm the exact configuration, documents, price, MOQ, lead time and support terms with the manufacturer before purchase.