Yaskawa Motoman MCHR5
by Yaskawa Electric
$35,000 - $55,000
The Yaskawa Motoman MCHR5 is a 6-axis cleanroom robot certified for ISO Class 3 (Class 1) environments — the most stringent cleanroom standard available. Unlike SCARA-based cleanroom robots, the 6-axis MCHR5 can reach around obstacles and present parts at any orientation, critical for complex semiconductor and pharmaceutical processes. At $35,000–$55,000, the MCHR5 is priced below FANUC cleanroom models while offering Yaskawa's proven cleanroom technology used in over 1,000 fabs worldwide. The H₂O₂ vapor decontamination compatibility makes it suitable for pharmaceutical aseptic processing environments. Yaskawa's cleanroom robot division has 30+ years of experience serving the semiconductor industry.
Applications
Specifications
| payload | 5kg |
| reach | 895mm |
| dof | 6 |
| repeatability | ±0.02mm |
| cleanroom_class | ISO Class 3 (Class 1) |
| weight | 58kg |
| speed | 2.5 m/s (TCP max) |
| ip_rating | Cleanroom sealed |
Key Features
ISO Class 3 (Class 1) certification — highest available
6-axis articulated arm for complex orientations
Yaskawa YRC1000 controller
H₂O₂ vapor decontamination compatible
Internal cable routing eliminates particle sources
Low-outgassing paint and seals
Integrated with Yaskawa's cleanroom conveyor systems
Use Cases
Advanced semiconductor wafer handling
Photomask and reticle handling
Pharmaceutical sterile filling
Biotechnology sample handling
Precision optical component assembly
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